ALD center Finland has a comprehensive set of thin film characterisation equipment.
The methods/instruments listed here can also be used to analyze thin films deposited with other methods besides ALD.
- ion beam techniques (ERDA, RBS, PIXE)
- Low-energy ion scattering (LEIS)
- X-ray diffraction (XRD), refection (XRR), and absorption spectroscopy (XAS)
- ellipsometry, UV-vis-FTIR spectroscopy and Raman spectroscopy
- electrical characterisation
- electron microscopy
- scanning probe microscopy