ALD center Finland has a comprehensive set of thin film characterisation equipment.
The methods/instruments listed here can also be used to analyze thin films deposited with other methods besides ALD.
- ion beam techniques (ERDA, RBS, PIXE)
- X-ray diffraction (XRD), refection (XRR), and absorption spectroscopy (XAS)
- ellipsometry, UV-vis-FTIR spectroscopy
- electrical characterisation
- electron microscopy (by exploiting the EM units of the Department of Chemistry and Biocenter Finland)
- scanning probe microscopy