We offer on demand tailored training!

We can organise special training on ALD and thin film characterisation. The content can be specifically tailored to meet your specific needs. Contact for further details!

M.Sc. in ALD

HelsinkiALD / ALD center Finland is now providing a well thought-out academic education program on Atomic Layer Deposition with skills highly relevant for also other thin film technologies.

The selected students will be majoring from Inorganic materials chemistry study track of Master’s Programme in Materials Research (link), but the courses are directed so that they are covering all important aspects of ALD, including precursors, thin film deposition and characterization as well as potential applications.

As a final part, Master's Thesis in the field of ALD is carried out, either in our HelsinkiALD team or companies working on ALD technology. Upon graduation a special certificate on the ALD focus will be awarded together with the Inorganic materials chemistry diploma.

List of courses for ALD master studies. Optional course selection agreed with the supervisor, with strongest recommendation to courses listed below.


50 cr


55 cr


15 cr

Introductory course to Materials Research
MATR301, 5 cr

Vacuum technology
MATR344, 5 cr

Solid state chemistry
MATR359, 5 cr

Materials characterization
MATR302, 5 cr

Thin films
MATR361, 10 cr

Elemental analysis by ion beams
MATR313, 5cr

Inorganic materials chemistry
MATR358, 5 cr

Atomic layer deposition and etching
MATR373, 5 cr

Chemicals and legislation
KEM411, 5 cr

Seminar in Materials Research
MATR364, 5 cr

Microscope techniques in materials characterization
MATR343, 5 cr

Physics of semiconductor devices
PAP340 5 cr

Master's Thesis in the field of ALD
MATR350, 30 cr

Workshop on X-ray diffraction and thermoanalytical methods
MATR362, 5 cr

Organometallic chemistry
KEM324, 5 cr

Surface physics
MATR308, 5 cr

other courses as agreed with supervisor

Surface chemistry
MATR341, 5 cr

Research project in Inorganic Materials Chemistry
MATR363, 15 cr

Please contact for more details!