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University of Helsinki Laboratory of Inorganic Chemistry

Laboratory of Inorganic Chemistry


Contact Information:

Laboratory of Inorganic Chemistry
Department of Chemistry
(A.I.Virtasen aukio 1)
P.O. Box 55
FI-00014 University of Helsinki

Head of the Laboratory
Markku Leskelš
Phone: +358-2941 50195

Mrs. Raija Jussila
Phone: +358-2941 50197

Thin Films and Other Nanostructured Materials


Thin films form the most important research topic in materials chemistry, Atomic Layer Deposition (ALD) being the most widely studied deposition method. Laboratory is worldwide in leading position in developing ALD chemistry. The laboratory also leads the Finnish Centre of Excellence in ALD ( In the same building is operating an R&D laboratory of ASM Microchemistry (ASMM) in an active contact with the laboratory's ALD group. ASMM and laboratory form a unique ALD research center with almost twenty ALD equipment from small scale to 200 mm wafer reactors.

Atomic Layer Deposition research is a balanced combination of basic and applied topics and covers basically all areas related to ALD: precursor synthesis and characterization, film growth and characterization, reaction mechanism studies, and the first steps of taking the processes toward applications. The emphasis in the ALD research has been in thin film materials needed in future generation integrated circuits. In addition, applications of ALD in energy technologies, optics, surface engineering and biomaterials are being studied too, for example.

Other thin film deposition techniques studied include electrodeposition, SILAR (successive ionic layer adsorption and reaction), electron beam evaporation (EBE), thermal evaporation and sol-gel.

Nanostructured materials are prepared by either directly (fibers by electrospinning and porous materials by anodisation) or by combining these or other templates with the thin film deposition techniques. Electrospinning is an attractive technique as it allows synthesis of macroscopic amounts of nanofibers in reasonably short times. The fibers posses high specific surface area like powders but can still be handled like monoliths. While the main focus is on inorganic materials, also organic and composite fibers are being studied. Anodisation in turn offers controlled ways to prepare ordered porous layers on silicon, aluminum and several other metals.

These pages give a brief overview of the research activities. For more details, please see the latest annual report of the Department of Chemistry or contact the Head of the Laboratory.